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http://hdl.handle.net/123456789/7381
Title: | Plasma-assisted MBE growth of AlN/GaN/AlNheterostructures on Si (111) substrate |
Authors: | M.Z. Mohd Yusoff Azzafeerah Mahyuddin Z. Hassan Y. Yusof M.A. Ahmad C.W. Chin H. Abu Hassan M.J. Abdullah (UniKL MIAT) |
Keywords: | AlN XRD TEM EDS line analysis |
Issue Date: | Aug-2013 |
Publisher: | Elsevier |
Citation: | Mohd Yusoff, M. Z., Mahyuddin, A., Hassan, Z., Yusof, Y., Ahmad, M. A., Chin, C. W., … Abdullah, M. J. (2013). Plasma-assisted MBE growth of AlN/GaN/AlN heterostructures on Si (111) substrate. Superlattices and Microstructures, 60, 500–507. doi:10.1016/j.spmi.2013.05.034 |
Series/Report no.: | Superlattices and Microstructures; |
Abstract: | The microstructure properties of AlN/GaN/AlN heterostructures on Si (1 1 1) substrate grown by plasma-assisted molecular beam epitaxy (MBE) have been studied and investigated. Reflection high energy electron diffraction (RHEED), high-resolution X-ray diffraction (HR-XRD), transmission electron microscopy (TEM), and energy dispersive X-ray spectroscopy (EDS) analysis were used to investigate a reconstruction pattern, cross section, and crystalline quality of the AlN/GaN/AlN heterostructures on Si (1 1 1) susbstrate. The reflection high energy electron diffraction images indicated a good surface morphology of AlN/GaN/AlN heterostructures on Si (1 1 1) substrate. The full width at half maximum (FWHM) obtained from XRD measurement was 0.46° (27.6 arcmin), indicating a good quality layer of sample. From TEM measurements, it is found that the crystalline quality of the AlN/GaN/AlN heterostructures is good comparable with previous report. |
Description: | Full text article available in ScienceDirect.ScienceDirect is accessible through UniKL Library Website |
URI: | http://www.sciencedirect.com/science/article/pii/S0749603613001730 http://www.academia.edu/4275573/Plasma_assisted_MBEgrowthof_Al_NGa_NAl_Nheterostructures_on_Si111substrate http://localhost/xmlui/handle/123456789/7381 |
Appears in Collections: | Journal Articles |
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